3 mA Dˉ RF Ion Source, Turnkey
- Model #: RF.D-3-30-SYS
- Last modification: Jun/5/2019
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- Maximum Dˉ current > 3 mA DC in 20 – 30 keV energy range
- Long intervals between maintenance (1 year)– no filaments to replace
- RF powered - no metal sputtering due to filaments (important for ion implantation)
- Ability to pulse beam
- Extensive beam instrumentation options
- Uses TRIUMF-licenced1 and University of Jyväskylä licenced technology
- Technology licensed from TRIUMF for world-wide distribution.
The RF.D-3.30-SYS Filament Ion Source system includes the following:
Ion source & vacuum box
- Vacuum system & gauges
- Power supplies
- High voltage grounding & bleeder circuits
- RF amplifier & impedance matching systems
- PLC controls & software
- User interface & Ethernet-based remote controls
- Mass flow controller for feed gasses Customizable with the following subsystems:
- Ion source stand and RF stand
- High-voltage Faraday cage / enclosure
- Low voltage and high voltage racks
- 40 kV isolation transformer
- Personnel access control interlocks
- Water flow gauges and interlocks
- Water de-ionization system
- Sliding Faraday cup
- Fiber optic beam profile monitor
- TRIUMF-licensed emittance scanner
A D-Pace news story about acheiving 3.5 mA DC D- (negative deuterium) beam with this ion source can be found here.
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