7.5 mA H- RF Ion Source, Turnkey System
- Model #: RF.H-7.5-30-SYS
- Last modification: Jun/5/2019
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TRIUMF1 & University of Jyväskylä Licensed RF Volume Cusp Ion Source System
D-Pace offers a complete turnkey 7.5 mA Hˉ RF ion source system, with a maximum current maximum Hˉ current > 7.5 mA DC in 20 – 30 keV energy range.
RF Ion Sources have the following important advantges over filament-powered ion sources:
- Long intervals between maintenance (>1 year) – no filaments to replace
- No sputtered metal deposits due to filaments (important for Ion Implantation)
- Ability to pulse beam
The system inccludes the ion source, software and controls, power supplies, vacuum pumps and instrumentation, high voltage subsystems, and access control. Beamlines, slits, emittance scanners, Faraday cups, collimators, and mass spectrometers can also be incorporated. This system can be operated standalone, but the PLC also integrates with higher level control systems through Ethernet controls.
Enquire about other negative and positive ion beams, and our higher current filament-powered ion sources
Particle Type |
Hˉ |
Beam Current |
0 to 7.5 mA |
Beam Kinetic Energy |
20 to 30 keV |
Normalized 4rms Emittance |
< 0.7 mm∙mrad |
Beam Purity |
> 99% |
RF Window Lifetime |
> 1 year |
Beam Current Stability |
< ± 1% over 24 hours |
Beamline Flange |
ISO 100 |
Instrument Port |
ISO 250 |
The RF.H-7.5-30-SYS RF Ion Source system is a complete, turnkey ion source system including:
- Ion source & Vacuum box
- Vacuum system & gauges
- Power supplies, PLC controls & software
- User interface & Ethernet-based remote controls
- Low voltage and high voltage racks
- 40kV isolation transformer
- Interlocks and HV grounding system
- Personnel access control interlocks
- Water flow gauges and interlocks
- Mass flow controller for feed gasses
- Optional high-voltage Faraday cage
- Optional water de-ionization system
- Optional sliding Faraday cup
- Optional fiber optic beam profile monitor
- Optional TRIUMF-licensed emittance scanner
- Optional 1:500 mass spectrometer with slits
- Technology licensed from TRIUMF for world-wide distribution.
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